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MILLION ACTUATOR

  • MILLION ACTUATOR

MILLION ACTUATOR

ISEL Original, Ultra High Precision, High Rigidity Linear Actuator Released, which "Million Guide" is equipped inside.

ISEL Original, Ultra High Precision, High Rigidity Linear Actuator Released, which "Million Guide" is equipped inside. - Ultra High Precision Linear Actuator Released, whose accuracy is 1µm!

Ultra-small 20mm square size has arrived! in response to many requests from customers.

Ultra-small 20mm square size has arrived! in response to many requests from customers.

Million Actuator

Million Actuator is a linear actuator that ISEL original roller type guide "Million Guide" is equipped inside. The "Million Guide" adopts needle rollers as rolling elements, and obtains the high precision linear travelling. Million Actuator holds the accuracy of three kinds of "1 micron" with high precision and high rigidity.


High Rigidity & High Precision Roller type linear motion guide "Million Guide" equipped inside.

High Rigidity & High Precision Roller type linear motion guide "Million Guide" equipped inside.

Point to Line

Point to Line


Three kinds of "1µm!"

Three kinds of "1µm!" - 1µm "Rigidity" - 1µm "Feed Accuracy" - 1µm "Linear Travelling"


Applications

Minute adjustment of the Mirror and Lens - X/Y/θ axis adjustment of the Alignment stage - Camera Focus - Test equipment - Sensor adjustment - Z axis stage positioning

  • Lens and mirror movement, minute angle adjustment of optical instruments like the stepper etc
  • X/Y/θaxis adjustment of the alignment stage
  • Positioning adjustment of the camera and sensor
  • Lens and mirror adjustment of the microscope/ telescope
  • Table positioning
  • Manufacturing equipment of the semiconductor and liquid crystal
  • Automatic machine and test equipment etc.


Astronomical Telescope:
indispensable for observation of a little star around tens of thousands light years away. It is ISEL Million Actuator that the astronomical telescope requires to reflect the little star clearly without deviation.



Million Actuator has 1µm Rigidity(*) - High precision wide roller realizes over 10 times rigidity compared to the conventional ball type. (*)Values may vary by the applications/conditions.

(*1)Values may vary by the dimensions/applications/conditions.


Comparison of Contact Area

Comparison of Contact Area
Million guide realizes high rigidity for its large contact area.

Comparison of Lateral Pressure Deflection (Rigidity)

Comparison of Lateral Pressure Deflection (Rigidity)

Application examples of Million guide

Million guide is used for the following applications by its high rigidity.
Punching Die of Motor core
Punching Die of Motor core
Punching Die of TAB tape
Punching Die of TAB tape



Million Actuator has 1µm Feed Accuracy(*) - ISEL has succeeded in low preload with keeping rigidity by using high precision wide rollers. Million guide has achieved 1 micron feed accuracy by minimizing the rolling resistance to the limit. For its high feed accuracy, Million guide is adopted for high precision positioning of the mirror, lens and table of the exposure machine. (*)Values may vary by the applications/conditions.

(*1)"1 micron feed accuracy" means that minute feeding of 1 micron unit is possible with our Million actuator. Repetitive positioning accuracy is less than ±1.0 micron in the feed direction. This value does not include the lead error of ball screw; considering the range of whole stroke, the lead error of ball screw needs to be added to this. Values may vary by the applications/ conditions.


Advantages of Roller type

Circular ball type
Ball contact/ collision makes friction, leading to wear, dust and heat emission.
The preload off and on are repeated at the ball circulation, and it makes one of major vibration factors.

Million guide (Roller type)
Rollers do not contact each other, and no contact, collision and friction occurs to rolling elements. No circulation and low preload structure makes less entry impact and vibration, and is smooth and ideal for minute feeding.
Friction / Congestion / Collision - No friction, contact & collision


Ultra low vibration supporting high dynamic accuracy

Dynamic accuracy ensured by low vibration under
1/20 compared to that of ball type.
Ultra low vibration supporting high dynamic accuracy

Tracking ability supporting 1µm feed accuracy

Million guide holds excellent tracking ability to enable minute feeding of 0.1 micron unit by minimizing the rolling resistance to the limit.
Tracking ability supporting 1µm feed accuracy



Million Actuator has 1µm Linear Travelling.(*) - Million guide realizes excellent linear travelling, with features of high rigidity and low vibration. Million guide repeatability, in particular, is over 3 times as accurate as that of conventional one. For its advantage, Million guide is widely adopted in the field of precision semiconductor, like minute drilling on PCB and semiconductor mounting etc. (*)Values may vary by the applications/conditions.

(*1)Values may vary by the applications/conditions.


Comparison of Repeatability: X/Y directions

Affected by vibration, low-rigidity ball type has larger variation in positional accuracy. Million actuator realizes excellent repeatability for its low vibration feature.
Comparison of Repeatability: X/Y directions - Repeatability
Over 3 times!!

Repetitive Positioning Accuracy: X/Y/Z directions

Combination of high precision Million guide and ball screw makes the repetitive positioning accuracy of Million actuator within +/-1.0 micron in X/Y/Z directions.
Repetitive Positioning Accuracy:
X/Y/Z directions - Repetitive Positioning Accuracy within ±1.0µm in all directions



Merits of Adopting Million actuator


1. Ultra High Precision1. Ultra High Precision
Improves product accuracy by high precision
positioning of 1µm unit,
which has been impossible before.
2. Space Saving - Conventional space2. Space Saving
Compact structure does not take much room.

3. Workload Reduction3. Workload Reduction
Integral construction reduces the customer's device design time.
Easy installation shortens assembly time.

Auto switch is equipped standard on the outside body.右へ Easy switch position adjustment, and space saving.
Motorless specification is also in standard line-up, as well as the specification with motor.
The specified motor type can be equipped that the customer wants. 右へ You can select the motor according to your control specifications and demand/request.

Order type of Standard Million actuator

Order type of Standard Million actuator

■ Dimensional Outline Drawing

GMA2010 □

GMA2010□

GMA2815 □

GMA2815□

GMA4220 □

GMA4220□

GMA6025 □

GMA6025□
*The above specifications are subject to change without advanced notice.

Cable Direction Selection in case with Standard Motor

M(Standard direction cable)

M(Standard direction cable)

ML (L direction cable)

ML (L direction cable)

MR (R direction cable)

MR (R direction cable)

*Above drawings are seen from the tip of actuator, and the reference plane is horizontal installation surface.

Motorless Specifications Motor Type Selection

GMA2010 □ Motor Type

GMA2010□ Motor Type
Selection D
A 15
B 16

GMA2815 □ Motor Type

GMA2815□ Motor Type
Selection L
A 20
B 15

GMA4220 □ Motor Type

GMA4220□ Motor Type
Selection d
A φ5
B φ6

GMA6025 □ Motor Type

GMA6025□ Motor Type
Selection d D P
A φ6.35 φ38.1 47.14
B φ10 φ36 50

Please make sure the motor to be equipped would fit the dimensions written above in case you purchase the motorless specification.
Contact us if you equip the motor of other dimensions written above.


Lineup / Standard Specifications - Million Actuator (GMA Series) Specifications

Product name Million Actuator
Type GMA2010M GMA2815M GMA4220M GMA6025M
Installation width 20×20mm 28×28mm 42×42mm 60×60mm
Effective stroke 10mm 15mm 20mm 25mm
Axial thrust(*1) Rating 30N 50N 150N 300N
Instantaneous maximum 60N 100N 250N 500N
Feed(*1) Rating 10mm/sec
(In case of Motor 600min-1)
15mm/sec
(In case of Motor 450min-1)
20mm/sec
(In case of Motor 400min-1)
Instantaneous maximum - 50mm/sec
(In case of
Motor 3000min-1)
100mm/sec
(In case of
Motor 3000min-1)
100mm/sec
(In case of
Motor 2000min-1)
Feed screw Precision ground ball screw
Screw lead 1mm 2mm 3mm
Repetitive positioning accuracy ±1.0µm
Lost motion 3.0µm
Resolution 0.1µm/pls(*2) 0.1µm/pls(*2) 0.2µm/pls(*2) 0.3µm/pls(*2)
Standard motor Stepping motor Si Servo (with encoder) made by Sanmei Co., Ltd.
TS3692N61S02 TS3641N61S02 TS3617N370S04 TS3653N324S04
Power supply voltage DC24V±10%
Sensor - Magnetic proximity switches 2 pcs
( AH008 made by ASA Electronics Industry )
Weight Approx.0.25kg Approx.0.4kg Approx.1.3kg Approx.3.7kg
Operating temperature range 0-50°C
  • (*1)Do not operate under the maximum thrust/ speed at all times, or the ball screw life could be significantly shortened;
    The maximum thrust/ speed operation should be limited to instantaneous use.
  • (*2)Values at resolution set of motor encoder "10000pls/rev".
  • It is the data with the standard motor equipped.
  • The weight includes the standard motor. (Cable weight is excluded.)
  • The repetitive positioning accuracy is limited under the condition where the actuator temperature is constant. (The influence is not considered by environmental/ actuator temperature change.)

Stepping Motor

Stepping Motor Si servoThe specifications with standard motor are delivered with the motor of the stepping servo system "Si Servo" made by Sanmei Co., Ltd. Please use after preparing for the driver "Type: Si-02DE (common with each size)" and the cables etc. separately at your side. The driver and the cables can be prepared at our side. Please ask us if necessary. Please contact us if you need the delivery with other motors equipped on the actuator at our side.
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