MILLION ACTUATOR
Million Actuator
Million Actuator is a linear actuator that ISEL original roller type guide "Million Guide" is equipped inside. The "Million Guide" adopts needle rollers as rolling elements, and obtains the high precision linear travelling. Million Actuator holds the accuracy of three kinds of "1 micron" with high precision and high rigidity.
High Rigidity & High Precision Roller type linear motion guide "Million Guide" equipped inside.

Point to Line

Three kinds of "1µm!"
Applications
- Lens and mirror movement, minute angle adjustment of optical instruments like the stepper etc
- X/Y/θaxis adjustment of the alignment stage
- Positioning adjustment of the camera and sensor
- Lens and mirror adjustment of the microscope/ telescope
- Table positioning
- Manufacturing equipment of the semiconductor and liquid crystal
- Automatic machine and test equipment etc.
(*1)Values may vary by the dimensions/applications/conditions.
Comparison of Contact Area

Million guide realizes high rigidity for its large contact area.
Comparison of Lateral Pressure Deflection (Rigidity)

Application examples of Million guide
Million guide is used for the following applications by its high rigidity.

(*1)"1 micron feed accuracy" means that minute feeding of 1 micron unit is possible with our Million actuator. Repetitive positioning accuracy is less than ±1.0 micron in the feed direction. This value does not include the lead error of ball screw; considering the range of whole stroke, the lead error of ball screw needs to be added to this. Values may vary by the applications/ conditions.
Advantages of Roller type
Ball contact/ collision makes friction, leading to wear, dust and heat emission.
The preload off and on are repeated at the ball circulation, and it makes one of major vibration factors.
Million guide (Roller type)
Rollers do not contact each other, and no contact, collision and friction occurs to rolling elements. No circulation and low preload structure makes less entry impact and vibration, and is smooth and ideal for minute feeding.

Ultra low vibration supporting high dynamic accuracy
Dynamic accuracy ensured by low vibration under1/20 compared to that of ball type.

Tracking ability supporting 1µm feed accuracy
Million guide holds excellent tracking ability to enable minute feeding of 0.1 micron unit by minimizing the rolling resistance to the limit.
(*1)Values may vary by the applications/conditions.
Comparison of Repeatability: X/Y directions
Affected by vibration, low-rigidity ball type has larger variation in positional accuracy. Million actuator realizes excellent repeatability for its low vibration feature.
Repetitive Positioning Accuracy: X/Y/Z directions
Combination of high precision Million guide and ball screw makes the repetitive positioning accuracy of Million actuator within +/-1.0 micron in X/Y/Z directions.

Improves product accuracy by high precision
positioning of 1µm unit,
which has been impossible before.

Compact structure does not take much room.

Integral construction reduces the customer's device design time.
Easy installation shortens assembly time.

The specified motor type can be equipped that the customer wants.

Order type of Standard Million actuator
■ Dimensional Outline Drawing
GMA2010 

GMA2815 

GMA4220 

GMA6025 

*The above specifications are subject to change without advanced notice.
Cable Direction Selection in case with Standard Motor
M(Standard direction cable)

ML (L direction cable)

MR (R direction cable)

*Above drawings are seen from the tip of actuator, and the reference plane is horizontal installation surface.
Motorless Specifications Motor Type Selection
GMA2010
Motor Type

Selection | D |
A | 15 |
B | 16 |
GMA2815
Motor Type

Selection | L |
A | 20 |
B | 15 |
GMA4220
Motor Type

Selection | d |
A | φ5 |
B | φ6 |
GMA6025
Motor Type

Selection | d | D | P |
A | φ6.35 | φ38.1 | 47.14 |
B | φ10 | φ36 | 50 |
Please make sure the motor to be equipped would fit the dimensions written above in case you purchase the motorless specification.
Contact us if you equip the motor of other dimensions written above.
Lineup / Standard Specifications - Million Actuator (GMA Series) Specifications
Product name | Million Actuator | ||||
Type | GMA2010M | GMA2815M | GMA4220M | GMA6025M | |
Installation width | 20×20mm | 28×28mm | 42×42mm | 60×60mm | |
Effective stroke | 10mm | 15mm | 20mm | 25mm | |
Axial thrust(*1) | Rating | 30N | 50N | 150N | 300N |
Instantaneous maximum | 60N | 100N | 250N | 500N | |
Feed(*1) | Rating | 10mm/sec (In case of Motor 600min-1) |
15mm/sec (In case of Motor 450min-1) |
20mm/sec (In case of Motor 400min-1) |
|
Instantaneous maximum | - | 50mm/sec (In case of Motor 3000min-1) |
100mm/sec (In case of Motor 3000min-1) |
100mm/sec (In case of Motor 2000min-1) |
|
Feed screw | Precision ground ball screw | ||||
Screw lead | 1mm | 2mm | 3mm | ||
Repetitive positioning accuracy | ±1.0µm | ||||
Lost motion | 3.0µm | ||||
Resolution | 0.1µm/pls(*2) | 0.1µm/pls(*2) | 0.2µm/pls(*2) | 0.3µm/pls(*2) | |
Standard motor | Stepping motor Si Servo (with encoder) made by Sanmei Co., Ltd. | ||||
TS3692N61S02 | TS3641N61S02 | TS3617N370S04 | TS3653N324S04 | ||
Power supply voltage | DC24V±10% | ||||
Sensor | - | Magnetic proximity switches 2 pcs ( AH008 made by ASA Electronics Industry ) |
|||
Weight | Approx.0.25kg | Approx.0.4kg | Approx.1.3kg | Approx.3.7kg | |
Operating temperature range | 0-50°C |
- (*1)Do not operate under the maximum thrust/ speed at all times, or the ball screw life could be significantly shortened;
The maximum thrust/ speed operation should be limited to instantaneous use. - (*2)Values at resolution set of motor encoder "10000pls/rev".
- It is the data with the standard motor equipped.
- The weight includes the standard motor. (Cable weight is excluded.)
- The repetitive positioning accuracy is limited under the condition where the actuator temperature is constant. (The influence is not considered by environmental/ actuator temperature change.)
Stepping Motor

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